Abstract

MEMS is a structural technology, an example of the design and development of sophisticated, well integrated electronics systems and mechanical devices utilizing single-stage manufacturing techniques . Techniques for making the MEMS enables the components and equipment with performance and increased production are combined with the advantages of the ordinary, such as reducing the size of the physical volume, weight and cost and providing a basis for the production of non-manufacturing methods, the other is the reality of internal order Technology MEMS and its micro-machining techniques are well versed in its application to an unprecedented range of MEMS devices over previous dependent fields (for example Biology and Microelectronics) These agents make MEMS far more comprehensive than IC microchips technology .